牌号简介 About |
---|
一个明显清晰和高度强化的全氟弹性体,结合超高纯度和良好的机械性能。该材料可用于先进的干湿半导体工艺,直至45nm节点及以上,具有超低的出气性能、高温稳定性和优异的抗等离子体性能,在极端条件下提供有效的密封。Perlast® G100XT将全氟化聚合物主链与高氟化交联系统结合,以提供具有优异耐高温性和侵蚀性半导体工艺的材料。这种材料的完全有机结构有助于消除颗粒,降低拥有成本。超低的压缩永久变形、高延伸率和极限拉伸强度增强了材料的化学性能。Perlast® G100XT的弹性模量很低,因此具有很高的密封效率。该材料在恒定压缩或恒定应变环境下具有很高的抗应力诱导化学侵蚀能力,从而延长使用寿命和可靠的密封性能。关键属性非常纯净-不含任何可能导致颗粒问题的无机填料。高温稳定性极低的压缩永久变形优良的机械性能极低的出气率高的密封效率降低了拥有成本(COO)典型应用静态密封晶片处理产品 A visibly clear and highly reinforced perfluoroelastomer, combining ultra- high purity with excellent mechanical properties. Developed for use in advanced wet and dry semiconductor processes down to the 45nm node and beyond, this material has ultra-low out-gassing properties, high temperature stability and excellent plasma resistance to provide effective sealing in extreme conditions. Perlast® G100XT combines a fully fluorinated polymer backbone with a highly fluorinated cross-linking system to provide a material with exceptional resistance to high temperature and aggressive semiconductor processes. The fully organic structure of the material helps to eliminate particles and reduce cost of ownership. The superior chemical performance of the material is enhanced by exceptionally low compression set, high elongation and ultimate tensile strength. Perlast® G100XT has a low modulus, giving it a very high sealing efficiency. The material is highly resistant to stress induced chemical attack in constant compression or constant strain environments, leading to longer service life and reliable sealing performance. Key Attributes Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems. High temperature stability Exceptionally low compression set Excellent mechanical properties Ultra low out-gassing High sealing efficiency Reduced Cost of Ownership (CoO) Typical Applications Static Seals Wafer Handling Products |
技术参数 Technical Data | |||
---|---|---|---|
机械性能 MECHANICAL |
额定值 Nominal Value |
单位 Units |
测试方法 Test Method |
邵氏硬度 Shore hardness |
|||
邵氏 A Shaw's A |
62 | ASTM D2240 | |
IRHD 硬度 IRHD hardness |
60 到 70 | ASTM D1415 , ISO 48 | |
弹性体 elastic body |
额定值 Nominal Value |
单位 Units |
测试方法 Test Method |
拉伸强度 tensile strength |
|||
屈服 yield |
16.0 | MPa | ASTM D412 , ISO 37 |
100% 应变 100% strain |
2.30 | MPa | ASTM D412 , ISO 37 |
拉伸应变 Tensile strain |
|||
断裂 fracture |
280 | % | ASTM D412,ISO 37 |
压缩形变 Compression deformation |
ASTM D395 , ISO 815 | ||
200℃,22 hr 200℃,22 hr |
% | ASTM D395,ISO 815 | |
200℃,70 hr 200℃,70 hr |
% | ASTM D395,ISO 815 | |
热性能 THERMAL |
额定值 Nominal Value |
单位 Units |
测试方法 Test Method |
最高工作温度 Maximum operating temperature |
℃ |
备注 |
---|
1 一般属性:这些不能被视为规格。 |
【新闻资讯】查看全部 |
【免责声明】 广州搜料信息技术有限公司保留所有权利。 此数据表中的信息由搜料网soliao.com从该材料的生产商处获得。搜料网soliao.com尽最大努力确保此数据的准确性。 但是搜料公司对这些数据值及建议等给用户带来的不确定因素和后果不承担任何责任,并强烈建议在最终选择材料前,就数据值与材料供应商进行验证。 |